Specialized Vacuum Equipment

Independent R&D, Full Integration, Intelligent, Easy Operation

Specialized Vacuum Equipment

Custom Vacuum Chambers

Applications: Semiconductor & IC manufacturing; Nanomaterial & thin-film processing; Integrated research platforms; Medical device production; High-power laser & radiation applications; Other industries requiring high/ultra-high vacuum environments.

 

Product Overview
A highly specialized vacuum system designed for applications requiring precise vacuum environments. Primary uses include: ultra-high vacuum for R&D; vacuum drying, processing and deposition in advanced manufacturing; semiconductor fabrication, thin-film deposition, and electronic device production; high-purity atmosphere isolation for valuable samples; fundamental research such as radiation shielding and particle acceleration.

 


Equipment Features
Custom Design
Provides tailored solutions in dimensions, structure, and materials to match specific applications.


High Sealing Performance
Premium materials and sealing design ensure long-term sealing stability.


Robust Structure
Rigid construction resists vibration and corrosion, suitable for complex environments.

 


Product Specifications

Max Vacuum Chamber Size Pumping Speed Materials Operating Pressure Range
Customizable to 10⁻⁸ Pa (XHV) Custom sizes from tens to hundreds of liters or larger Matched pumping systems ensure rapid evacuation Premium stainless steel (304/316L) meets corrosion/thermal needs Atmosphere to UHV